Alphacen 200 Drive
Your Wafers Analyzed
Based on our expertise designing industrial metrology systems, Nanosurf developed the Alphacen 200 Drive – an advanced AFM system engineered to meet the high demands of the semiconductor industry.
From unparalleled low-noise roughness analysis using WaveMode, to complex electrical characterization tasks with SMM, the Alphacen 200 Drive solves the challenges typically faced by semiconductor manufacturing and research.
Performance
The Alphacen 200 Drive is meticulously crafted to meet the intricate demands of semiconductor research and development. This state-of-the-art atomic force microscope excels in capturing images at the atomic level, thanks to its innovative flexure tip scanner architecture. The inclusion of the CleanDrive photothermal excitation method ensures stable and low-noise operation, allowing for detailed analysis of surfaces with minimal roughness. Furthermore, the Alphacen 200 Drive boasts WaveMode, the fastest off-resonance imaging mode available, making it possible to gently image even the smallest structures.
Image: Time-series of surface roughness measurements of a silicon wafer using WaveMode. Images in the top row show images at the beginning of the series and after 10 h. The graph below shows the roughness determined from each image of the series.
Versatility
Automation
Explore how the fully automated laser alignment and cantilever calibration effortlessly enhance your measurement process. Make use of the programmable, fully addressable 200 x 200 mm2 sample stage and WaveMode of the Alphacen 200 Drive, to obtain precise and consistent roughness and dimensional measurements throughout the entire range.
Obtaining Highest Resolution with a Large Scanner
Thanks to the superior technology of the DriveAFM scan head, imaging at atomic resolution is possible, even on this large-stage system.
This powerful combination allows for the observation of feature sizes covering several orders of magnitude, making a wide variety of structures accessible for analysis.
Image: Atomic lattice of gypsum.
Gain Insight into the Local Nanoelectrical Properties
The Alphacen 200 Drive, when paired with Nanosurf's SMM solution, enables precise electrical characterization at the nanoscale. Researchers have the capability to measure local capacitance, carrier density, resistance, conductivity, and the dielectric constant of structures within cutting-edge integrated circuits. Additionally, SMM can analyze sub-surface features of complex multilayered designs. This advanced SMM solution guarantees the quickest time-to-results, facilitating a more profound understanding of materials in semiconductor research and development.
Image: Topography (left) and imaginary part of the complex S11 parameter representing local capacitance (right).
Download the Alphacen 200 Drive Brochure
The PDF brochure includes details on the Alphacen 200 Drive technology, application examples for different areas of interest and system specifications.
Example Measurements
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Get to know the Alphacen 200 Drive! Reach out to us to discuss your application with one of our seasoned AFM experts, to get a budgetary quote or schedule a product demonstration or exploratory meeting.
